MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets. Thousands of practitioners and students have gained a solid understanding of MEMS with the best-selling first edition of this book. Now in its second edition, An Introduction to Microelectromechanical Systems Engineering brings readers to up-to-date with the latest developments in this cutting-edge area. Featuring brand new coverage of today’s hottest topics, such as RF MEMS and photonic MEMS, this thoroughly revised resource shows engineers, technical managers, and executives how their projects may benefit from a MEMS solution.
Additional information
Weight
0.745 kg
Product Properties
Year of Publication
2004
Table of Contents
MEMS: A Technology from Lilliput. The Sandbox: Materials for MEMS. The Toolbox: Processes for Micromachining. MEM Structure and Systems in Industrial and Automotive Applications. Optical MEM Structures and Systems. MEM Structures and Systems for Medical Applications. MEM Structures and Systems for Electronic Applications.
Author
Nadim Maluf
ISBN/ISSN
9781580535908
Binding
Hardback
Edition
2
Publisher
Artech House
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